Regenerative Thermal Oxidizer in semiconductor industry

Pendahuluan

Semiconductor manufacturing is an energy-intensive industry which relies on specialized equipment to maintain quality and efficiency. The Pengoksidasi Termal Regeneratif, or RTO, is a key component of many semiconductor manufacturing plants. In this article, we will explore the importance of RTOs in the semiconductor industry, their basic functioning, and how they help to ensure that semiconductor manufacturing is both sustainable and efficient.

What is an RTO?

An RTO is a type of industrial air pollution control system that is used to treat exhaust air from industrial processes. In the case of the semiconductor industry, RTOs are designed to treat the air that is exhausted from the various process tools used in semiconductor manufacturing. The RTO works by using a combination of heat and chemical reactions to convert the harmful pollutants in the exhaust air into harmless compounds before releasing it into the atmosphere.

How does an RTO work?

An RTO works by using a process called thermal oxidation to break down and eliminate harmful pollutants from the exhaust air. The RTO consists of three main components: the combustion chamber, the heat exchanger, and the control system. The combustion chamber is where the pollutant-laden exhaust air is introduced and heated to a high temperature. The heat exchanger is where the hot exhaust air is cooled down and the heat is captured and reused. The control system is responsible for monitoring and controlling the temperature, flow rate, and other parameters to ensure that the RTO is operating efficiently.

Benefits of RTOs in the Semiconductor Industry

RTOs offer several benefits to the semiconductor industry, including:

1. Compliance with environmental regulations

The semiconductor industry is subject to strict environmental regulations, and RTOs help to ensure that these regulations are met. By treating the exhaust air from the various process tools, RTOs help to reduce the emissions of harmful pollutants such as volatile organic compounds (VOCs) and nitrogen oxides (NOx).

2. Energy efficiency

RTOs are energy-efficient, as they are able to recover and reuse much of the heat generated during the combustion process. This means that less energy is required to maintain the high temperatures needed for the thermal oxidation process, leading to lower energy costs and increased sustainability.

3. Cost savings

By reducing the emissions of harmful pollutants, RTOs can also help to reduce the costs associated with environmental compliance. In addition, the energy savings associated with RTOs can also lead to significant cost savings over time.

RTOs in Action: A Case Study

To illustrate the effectiveness of RTOs in the semiconductor industry, let us examine a case study. A semiconductor manufacturing plant in California was facing increasing pressure to reduce its emissions of VOCs and other harmful pollutants. The plant installed an RTO to treat the exhaust air from its process tools, and the results were impressive. The RTO was able to reduce the emissions of VOCs by over 90%, resulting in significant cost savings and a cleaner environment.

Kesimpulan

In conclusion, RTOs play a crucial role in the semiconductor industry by helping to ensure compliance with environmental regulations, promoting energy efficiency, and reducing costs. By using a combination of heat and chemical reactions, RTOs are able to treat exhaust air from industrial processes and convert harmful pollutants into harmless compounds. As semiconductor manufacturing continues to grow and evolve, RTOs will remain an essential component of a sustainable and efficient industry.

Pengenalan Perusahaan

We are a high-end equipment manufacturing enterprise focusing on the comprehensive treatment of volatile organic compound (VOC) exhaust gas and carbon reduction energy-saving technology in the semiconductor industry.

Core Technologies

• Thermal, combustion, sealing, and self-control four core technologies
• Kemampuan pemodelan simulasi medan suhu dan simulasi medan aliran udara
• Ability to perform ceramic heat storage material performance, molecular sieve adsorption material selection, and VOC high-temperature incineration oxidation characteristics experimental testing

Team Advantages

We have RTO technology research and development center and waste gas carbon reduction engineering technology center in Xi’an, and a 30,000 square meter production base in Yangling. We are a leading manufacturer of RTO equipment and molecular sieve rotary equipment in terms of production and sales. Our core technical team comes from the Aerospace Liquid Rocket Engine Research Institute (Aerospace Sixth Academy). We currently have more than 360 employees, including over 60 R&D technical backbone members, including 3 senior engineers and 6 senior engineers, and 34 thermodynamics doctors.

Produk Inti

Our core products are the rotary valve regenerative thermal oxidizer (RTO) and molecular sieve adsorption concentrator. With our expertise in environmental protection and thermal energy system engineering, we can provide customers with comprehensive solutions for industrial exhaust gas treatment, energy utilization, and carbon reduction in various operating conditions.

Company Certification, Patent, and Honors

• Sertifikasi Sistem Manajemen Kekayaan Intelektual
• Sertifikasi Sistem Manajemen Mutu
• Sertifikasi Sistem Manajemen Lingkungan
• Kualifikasi Perusahaan Industri Konstruksi
• Perusahaan Teknologi Tinggi
• Patent for Rotary Valve Regenerative Thermal Oxidizer
• Patent for Rotary Heat Storage Incineration Equipment
• Patent for Disc Molecular Sieve Rotary Equipment

Choosing the Right RTO Equipment

• Consider the specific requirements of the semiconductor industry

Explanation: The RTO equipment should be designed to meet the specific needs and challenges of the semiconductor industry, such as treating VOCs emitted during manufacturing processes.

• Evaluate the capacity and efficiency

Explanation: The RTO equipment should have the necessary capacity and high efficiency to effectively treat the volume and concentration of VOCs in the semiconductor industry.

• Assess the operational and maintenance costs

Explanation: It is important to consider the long-term operational costs and maintenance requirements of the RTO equipment to ensure cost-effectiveness for the semiconductor industry.

• Ensure compliance with environmental regulations

Explanation: The chosen RTO equipment should comply with the relevant environmental regulations and standards to ensure legal and sustainable operations in the semiconductor industry.

Service Process

1. Consultation and Evaluation:
• Preliminary consultation
• On-site inspection
• Needs analysis
2. Design and Solution Development:
• Designing the solution
• Simulating and modeling
• Solution review
3. Production and Manufacturing:
• Customized production
• Quality control
• Factory testing
4. Installation and Commissioning:
• On-site installation
• Commissioning and operation
• Training services
5. After-sales Support:
• Regular maintenance
• Technical support
• Supply of spare parts

We provide one-stop solutions and have a professional team to customize RTO solutions for our customers, ensuring the success of each step.

Penulis: Miya