RTO Thermal Oxidizer for Semiconductor Industry

Regenerative Thermal Oxidizer (RTO) is an advanced technology widely used in the semiconductor industry for the treatment of volatile organic compounds (VOCs) and hazardous air pollutants (HAPs). This highly efficient system ensures compliance with environmental regulations and promotes sustainable practices in semiconductor manufacturing.

Benefits of RTO Thermal Oxidizer

• High VOC Destruction Efficiency

RTO thermal oxidizers are designed to achieve high VOC destruction efficiency, typically above 99%. This ensures the effective elimination of harmful emissions released during semiconductor manufacturing processes.

• 에너지 효율성 및 비용 절감

The regenerative design of RTO 열 산화기
s allows for the recovery of heat energy generated during VOC combustion. This recovered energy is then used to preheat the incoming process gas stream, resulting in significant energy savings and reduced operating costs.

• 낮은 유지 관리 요구 사항

RTO thermal oxidizers have a simple and robust design, making them easy to operate and maintain. The absence of complex components reduces the need for frequent maintenance, minimizing downtime and maximizing production efficiency.

• 환경 규정 준수

RTO thermal oxidizers play a crucial role in helping semiconductor manufacturers meet stringent environmental regulations. By effectively destroying VOCs and HAPs, these systems prevent their release into the atmosphere, reducing the environmental impact of semiconductor manufacturing.

RTO 열 산화기 작동

The operation of an RTO thermal oxidizer involves several key steps:

1. 흡착

The VOC-laden process gas is directed into the first regenerator, where ceramic media with a high surface area adsorbs the VOCs.

2. 예열

The clean process gas is preheated as it passes through the regenerator, utilizing the stored heat from the previous cycle.

3. 연소

The preheated gas enters the combustion chamber, where it is brought to the required temperature for combustion. The VOCs are oxidized into carbon dioxide and water vapor.

4. 열 회수

The hot, clean gas leaving the combustion chamber passes through the second regenerator, transferring its heat to the ceramic media.

5. Cooling and Discharge

The treated gas is cooled before being discharged into the atmosphere, while the ceramic media in the first regenerator is purged of adsorbed VOCs by a flow of clean air.

Overall, the operation of an RTO thermal oxidizer ensures the efficient destruction of VOCs while minimizing energy consumption and maintaining environmental compliance.

회사 소개

We are a high-tech equipment manufacturing enterprise specializing in comprehensive management of volatile organic compounds (VOCs) exhaust and carbon emission reduction and energy-saving technology in the semiconductor industry. Our core technologies include thermal energy, combustion, sealing, and automatic control, with the ability to simulate temperature and airflow fields, model calculations, select ceramic heat storage materials, molecular sieve adsorption materials, and conduct VOCs high-temperature incineration and oxidation experiments.

We have RTO technology R&D center and waste gas carbon reduction engineering technology center in Xi’an, and a 30,000©O production base in Yangling. We are the leading manufacturer of RTO equipment and molecular sieve rotary equipment in terms of output and sales volume worldwide. Our core technology team comes from the Aerospace Liquid Rocket Engine Research Institute (Aerospace 6th Institute). We have more than 360 employees, including over 60 R&D technical backbones, 3 research fellows, 6 senior engineers, and 197 thermodynamic doctors.

Our core products are RTO and molecular sieve adsorption and concentration rotary devices. Combined with our own environmental protection and thermal energy system engineering technology expertise, we can provide customers with comprehensive solutions for industrial exhaust gas treatment, thermal energy utilization, carbon emission reduction, and more.

인증, 특허 및 영예

저희 회사는 다음과 같은 인증 및 자격을 취득하였습니다.

• 지식재산권 관리체계 인증
• 품질경영시스템 인증
• 환경경영시스템 인증
• 건설산업기업자격
• 첨단기술기업인증
• Patents for RTO valve for rotary heat storage oxidation furnace, rotary heat storage incineration equipment, and disc-shaped molecular sieve rotary equipment, etc.

Picture:

올바른 RTO 장비를 선택하는 방법

Choosing the right RTO equipment requires the following steps:

1. 배기가스의 특성을 파악한다
2. 지역 규정 및 배출 기준을 이해하세요
3. 에너지 효율성 평가
4. 운영 및 유지 관리를 고려하세요
5. 예산 및 비용 분석
6. 적절한 RTO 유형을 선택하세요
7. 환경 및 안전 요소를 고려하세요
8. 성능 테스트 및 검증

설명:

서비스 프로세스

당사의 서비스 프로세스는 다음 단계로 구성됩니다.

1. 협의 및 평가: 사전 협의, 현장 점검, 니즈 분석
2. Design and plan: program design, simulation and modeling, program review
3. 생산 및 제조: 맞춤 생산, 품질 관리, 공장 테스트
4. 설치 및 시운전: 현장 설치, 시운전 및 운영, 교육 서비스
5. 애프터 서비스 지원: 정기 유지보수, 기술 지원, 예비 부품 공급

설명:

We are a one-stop solution provider with a professional team that tailors RTO solutions to customers’ needs.

저자: 미야