What are the key considerations for RTO gas treatment in the semiconductor industry?

Regenerative thermal oxidizers (RTOs) have become an essential part of the semiconductor industry’s manufacturing process. RTOs are designed to treat volatile organic compounds (VOCs) that are released during the manufacturing process. However, there are several key considerations that must be taken into account when implementing RTO gas treatment in the semiconductor industry. In this article, we will explore these considerations in detail.

1. Temperature control

Temperature control is essential in RTOs to ensure that the system operates efficiently. The temperature needs to be accurately controlled to ensure that the oxidation process takes place at the correct temperature and to avoid any potential issues with overheating. It is essential to monitor the temperature in the RTO closely. If the temperature is too high, the destruction efficiency can be reduced, and the RTO can be damaged.

2. Flow rate control

The flow rate of gas through the RTO must be carefully controlled to ensure that the system operates efficiently. An incorrect flow rate can lead to poor destruction efficiency and can cause the system to malfunction. It is crucial to control the flow rate of gas to ensure that the right amount of air is supplied to the system.

3. VOC concentration

VOC concentration is another important consideration when implementing RTO gas treatment in the semiconductor industry. The system must be designed to handle the specific VOCs released during the manufacturing process. It is essential to monitor the VOC concentration closely to ensure that the system is functioning correctly and to avoid any potential issues with the system.

4. Heat recovery

Heat recovery is an important consideration when implementing RTO gas treatment in the semiconductor industry. The system generates a considerable amount of heat during the oxidation process. This heat can be recovered and used to heat other parts of the manufacturing process. It is essential to recover as much heat as possible to increase efficiency and reduce operating costs.

5. Maintenance

Maintenance is essential in RTOs to ensure that the system is operating correctly and efficiently. The system must be regularly maintained to avoid any potential issues with the system. It is crucial to monitor the system closely to identify any potential issues before they become more severe.

6. System design

The system design is critical when implementing RTO gas treatment in the semiconductor industry. The system must be designed to handle the specific VOCs released during the manufacturing process. It is crucial to design the system correctly to ensure that it can handle the required flow rate and VOC concentration.

7. Energy consumption

Energy consumption is a critical consideration when implementing RTO gas treatment in the semiconductor industry. The system consumes a significant amount of energy during operation. It is essential to monitor energy consumption closely and identify areas where energy can be saved to reduce operating costs.

8. System integration

System integration is an essential consideration when implementing RTO gas treatment in the semiconductor industry. The system must be integrated correctly with other parts of the manufacturing process. It is crucial to ensure that the system is properly integrated and that it can function correctly with other systems.

In conclusion, RTO gas treatment is an essential part of the semiconductor manufacturing process. However, there are several key considerations that must be taken into account when implementing RTO gas treatment. Temperature control, flow rate control, VOC concentration, heat recovery, maintenance, system design, energy consumption, and system integration are all critical considerations that must be addressed to ensure that the system operates efficiently.

We are a high-tech enterprise that specializes in the comprehensive treatment of volatile organic compounds (VOCs) waste gas as well as carbon reduction and energy-saving technology for high-end equipment manufacturing. Our core technical team comprises over 60 R&D technicians, including 3 senior engineers at the researcher level and 16 senior engineers, all of whom originate from the Aerospace Liquid Rocket Engine Research Institute (Aerospace Sixth Institute). We have four core technologies- thermal energy, combustion, sealing, and automatic control- and have the ability to simulate temperature fields and air flow field simulation modeling and calculation. Our company has built an RTO technology research and development center and an exhaust gas carbon reduction engineering technology center in the ancient city of Xi’an and a 30,000m122 production base in Yangling. Our production and sales volume of RTO equipment is far ahead of the world.

Our R&D platform comprises a series of modern technologies such as:

– High-efficiency combustion control technology experimental platform
– Molecular sieve adsorption efficiency experimental platform
– High-efficiency ceramic thermal storage technology experimental platform
– Ultra-high temperature waste heat recovery experimental platform
– Gas fluid sealing technology experimental platform

High-efficiency combustion control technology experimental platform:
Our cutting-edge combustion control technology experimental platform is equipped with all necessary equipment, such as air supply systems, natural gas supply systems, and waste gas collection and analysis systems, among others. This platform can effectively simulate and analyze the combustion process of various fuels, which can be used to develop new combustion systems that are both energy-efficient and environmentally friendly.

Molecular sieve adsorption efficiency experimental platform:
This experimental platform is equipped with advanced molecular sieve adsorption materials and a range of experimental devices that can simulate the conditions of various industrial gas sources in order to determine the optimal adsorption conditions for different molecular sieve materials. This platform enables us to develop highly efficient molecular sieve adsorption systems that can effectively remove VOCs from industrial gas sources.

High-efficiency ceramic thermal storage technology experimental platform:
Our high-efficiency ceramic thermal storage technology experimental platform is equipped with cutting-edge equipment for measuring and testing the thermal storage capacity and thermal conductivity of ceramic materials. We can use this platform to develop highly efficient ceramic thermal storage materials that can effectively store thermal energy and release it when needed.

Ultra-high temperature waste heat recovery experimental platform:
This experimental platform is designed to test and evaluate the performance of different waste heat recovery technologies under ultra-high temperature conditions. This platform enables us to develop highly efficient waste heat recovery systems that can effectively recover waste heat from high-temperature industrial gases.

Gas fluid sealing technology experimental platform:
Our gas fluid sealing technology experimental platform is equipped with advanced equipment for measuring and testing the sealing performance of various sealing materials under different temperature, pressure, and gas fluid conditions. This platform enables us to develop highly efficient gas fluid sealing systems that can effectively prevent gas leakage and improve the overall efficiency of industrial equipment.

Our core technology has enabled us to apply for 68 patents, including 21 invention patents and 41 utility model patents, covering key components of our products. Currently, we have been granted four invention patents, 41 utility model patents, six design patents, and seven software copyrights.

Our production capacity includes:

– Steel plate and section automatic shot blasting and painting production line
– Manual shot blasting production line
– Dust removal and environmental protection equipment
– Automatic paint spraying room
– Drying room

Our production lines are equipped with cutting-edge equipment, such as automatic welding machines, CNC cutting machines, and CNC bending machines, which can ensure the high-precision production of our equipment. We also have a strict quality control system in place that ensures all of our products meet the highest quality standards.

We invite customers to partner with us and take advantage of the following benefits:

1. Advanced and reliable technology
2. High-quality products
3. Customized solutions
4. Efficient and professional service
5. Competitive pricing
6. Timely delivery

We have served a wide range of industries, such as coating, petrochemical, electronics, and pharmaceutical, among others. Our products have been well received by customers worldwide, and we are committed to providing customers with high-quality products and services.

Autor: Miya