RTO Gas Treatment Semiconductor Industry

Introduction

RTO, or Regenerative Thermal Oxidation, is an effective method of air pollution control for semiconductor manufacturing plants. This technology works by using high temperatures to break down hazardous compounds in exhaust gases emitted by semiconductor manufacturing processes. With the semiconductor industry rapidly growing, it is essential to have effective air pollution control measures in place to maintain air quality standards and minimize the environmental impact of semiconductor manufacturing.

What is RTO Gas Treatment?

• RTO Gas Treatment is a process that uses high temperatures to break down hazardous compounds in exhaust gases from manufacturing processes.
• This process is highly effective in reducing pollution levels, and it is widely used in the semiconductor industry.
• RTO systems consist of a combustion chamber, a ceramic heat exchanger, and a control system.
• The system works by preheating the incoming gas stream before it enters the combustion chamber, where it is heated to a temperature of around 1500¡ãF.
• The hot gas then passes through the ceramic heat exchanger, where it gives up its heat to the incoming gas stream.
• The outgoing gas stream is then cooled down to a temperature of around 100¡ãF before being released into the atmosphere.

How Does RTO Gas Treatment Work?

• RTO systems work by using a combination of high temperatures and residence time to break down hazardous compounds in exhaust gases from manufacturing processes.
• The process starts by preheating the incoming gas stream to a temperature of around 800¡ãF.
• The preheated gas then enters the combustion chamber, where it is heated to a temperature of around 1500¡ãF.
• The high temperature causes the hazardous compounds in the gas stream to break down into less harmful compounds such as water and carbon dioxide.
• The resulting gas stream is then directed through a ceramic heat exchanger, where the heat is transferred to the incoming gas stream.
• The outgoing gas stream is then cooled down to a temperature of around 100¡ãF before being released into the atmosphere.

Benefits of RTO Gas Treatment

• RTO Gas Treatment is highly effective in reducing pollution levels and maintaining air quality standards in the semiconductor industry.
• It is a cost-effective solution for controlling air pollution in semiconductor manufacturing plants.
• RTO systems are easy to operate and require minimal maintenance.
• They are also energy-efficient, as the heat recovered from the outgoing gas stream can be used to preheat the incoming gas stream.
• RTO systems can also be customized to meet the specific needs of semiconductor manufacturing plants.

Applications of RTO Gas Treatment in Semiconductor Industry

• RTO Gas Treatment is commonly used in the semiconductor industry for controlling air pollution emissions.
• It is used in the manufacturing of various semiconductor products, including microchips, integrated circuits, and memory devices.
• RTO systems are also used in the etching, lithography, and deposition processes in semiconductor manufacturing.

The Future of RTO Gas Treatment in Semiconductor Industry

• RTO Gas Treatment is expected to become even more popular in the semiconductor industry in the future as the industry continues to grow.
• Newer and more efficient RTO systems are being developed to meet the specific needs of semiconductor manufacturing plants.
• The use of RTO Gas Treatment is also expected to increase as environmental regulations become more stringent.

Conclusion

RTO Gas Treatment is an effective method of air pollution control for semiconductor manufacturing plants. With the semiconductor industry rapidly growing, it is essential to have effective air pollution control measures in place to maintain air quality standards and minimize the environmental impact of semiconductor manufacturing. RTO systems are highly effective, cost-effective, energy-efficient, and easy to operate and maintain. They are widely used in the semiconductor industry for controlling air pollution emissions and are expected to become even more popular in the future.

We are a high-tech enterprise specializing in the comprehensive treatment of volatile organic compounds (VOCs) waste gas and carbon reduction and energy-saving technology for high-end equipment manufacturing. Our core technical team comes from the Aerospace Liquid Rocket Engine Research Institute (Aerospace Sixth Institute); it has more than 60 R&D technicians, including 3 senior engineers at the researcher level and 16 senior engineers. It has four core technologies: thermal energy, combustion, sealing, and automatic control; it has the ability to simulate temperature fields and air flow field simulation modeling and calculation; it has the ability to test the performance of ceramic thermal storage materials, the selection of molecular sieve adsorption materials, and the experimental testing of the high-temperature incineration and oxidation characteristics of VOCs organic matter. The company has built an RTO technology research and development center and an exhaust gas carbon reduction engineering technology center in the ancient city of Xi’an, and a 30,000m2 production base in Yangling. The production and sales volume of RTO equipment is far ahead in the world.

Introduction to Our Research and Development Platforms

1. High-Efficiency Combustion Control Technology Test Bench

This test bench is designed to evaluate and optimize the combustion process for efficient waste gas treatment. It enables us to study and develop advanced combustion techniques, ensuring high destruction efficiency and low energy consumption.

2. Molecular Sieve Adsorption Efficiency Test Bench

With this test bench, we can investigate and assess the performance of various molecular sieve adsorption materials. It allows us to identify the most effective adsorbents for VOCs removal, leading to enhanced treatment efficiency.

3. High-Efficiency Ceramic Thermal Storage Technology Test Bench

This test bench focuses on the development and evaluation of ceramic thermal storage materials for waste heat recovery. It enables us to test and optimize the thermal storage capacity, durability, and heat transfer efficiency of different ceramic materials.

4. Ultra-High Temperature Waste Heat Recovery Test Bench

Using this test bench, we can explore innovative technologies for recovering and utilizing ultra-high temperature waste heat. It allows us to assess the performance and feasibility of various waste heat recovery methods, contributing to energy conservation.

5. Gas Fluid Sealing Technology Test Bench

The gas fluid sealing technology test bench is dedicated to studying and improving the sealing performance of equipment used in waste gas treatment. It helps us develop advanced sealing solutions that minimize leakage and ensure operational safety.

We have achieved remarkable success in our research and development efforts, resulting in numerous patents and honors. We have applied for a total of 68 patents, including 21 invention patents, covering critical components of our technologies. Among them, we have been granted 4 invention patents, 41 utility model patents, 6 design patents, and 7 software copyrights.

Production Capacity

1. Steel Plate and Profile Automatic Shot Blasting and Painting Production Line

This production line enables efficient surface treatment of steel plates and profiles used in our equipment manufacturing. It ensures excellent coating adhesion and corrosion resistance, resulting in durable and high-quality products.

2. Manual Shot Blasting Production Line

The manual shot blasting production line is capable of cleaning and preparing small and complex components for further processing. It provides precise and thorough surface treatment, ensuring optimal performance and longevity.

3. Dust Removal and Environmental Protection Equipment

In our production base, we have advanced facilities for manufacturing dust removal and environmental protection equipment. These systems effectively capture and remove harmful particles and gases, promoting a clean and safe working environment.

4. Automatic Painting Booth

We have a state-of-the-art automatic painting booth that ensures consistent and high-quality coatings on our equipment. It guarantees excellent aesthetic appeal and corrosion resistance, meeting the highest industry standards.

5. Drying Room

Our drying room is equipped with advanced technology to facilitate the drying process for our manufactured products. It ensures optimal drying conditions, leading to superior product quality and performance.

We invite our clients to collaborate with us and benefit from our expertise in waste gas treatment and energy-saving technologies. Here are six advantages of partnering with us:

• 1. Cutting-edge R&D capabilities, ensuring innovative and effective solutions.
• 2. Extensive experience in VOCs waste gas treatment and carbon reduction.
• 3. Advanced research and testing facilities for technology validation.
• 4. Proven track record of successful patents and technical achievements.
• 5. High-quality production capabilities for reliable and durable equipment.
• 6. Commitment to environmental protection and energy conservation.

Autor: Miya