Recuperative Thermal Oxidizer for Semiconductor Industry

はじめに

Semiconductor manufacturing involves the use of various chemicals and solvents that emit harmful gases into the atmosphere. These gases contribute to air pollution, which is a significant environmental concern. To mitigate this problem, recuperative thermal oxidizers are increasingly being used in the semiconductor industry. Recuperative thermal oxidizers are pollution control devices that destroy harmful gases and odors emitted during the manufacturing process by converting them into harmless substances.

How does a 再生熱酸化装置 work?

A recuperative thermal oxidizer works by using high temperatures to convert harmful gases into harmless substances. The process involves heating the polluted air to a temperature of approximately 1500¡ãF while mixing it with an adequate amount of oxygen. The mixture is then passed through a heat exchanger that recovers the heat generated during the process. The heat is then used to preheat the incoming polluted air, reducing the amount of energy required to reach the desired temperature. As the gases flow through the combustion chamber, they are oxidized and converted into carbon dioxide, water vapor, and heat. The purified air is released into the atmosphere, while the heat generated can be recovered and used to preheat incoming air, reducing energy consumption.

Benefits of using Recuperative Thermal Oxidizers in Semiconductor Industry

Using recuperative thermal oxidizers in semiconductor manufacturing brings several benefits, including:

• Reduced air pollution: Recuperative thermal oxidizers reduce the amount of harmful gases emitted into the environment, thus reducing air pollution.
• Compliance with regulations: The use of recuperative thermal oxidizers helps to comply with environmental regulations and avoids penalties that may arise from non-compliance.
• Energy efficiency: Recuperative thermal oxidizers are energy-efficient, and the heat generated during the process can be recovered and used to preheat incoming air, reducing energy consumption.
• Cost savings: Recovering the heat generated during the process can lead to significant cost savings on energy bills, making recuperative thermal oxidizers a cost-effective solution.
• Improved workplace safety: The use of recuperative thermal oxidizers improves workplace safety by eliminating harmful gases, which can be dangerous when inhaled by workers.

Types of Recuperative Thermal Oxidizers

There are two main types of recuperative thermal oxidizers: the direct-fired recuperative thermal oxidizer and the indirect-fired recuperative thermal oxidizer.

Direct-fired Recuperative Thermal Oxidizer

Direct-fired recuperative thermal oxidizers are used when the concentration of volatile organic compounds (VOCs) is relatively high. The process involves burning the gases directly in the combustion chamber, and the heat generated is used to preheat the incoming air.

Indirect-fired Recuperative Thermal Oxidizer

Indirect-fired recuperative thermal oxidizers are used when the concentration of VOCs is low. The process involves heating the gases indirectly by passing them through a heat exchanger. The heat generated is then used to preheat the incoming air.

結論

Recuperative thermal oxidizers are an effective solution for reducing harmful gas emissions in the semiconductor industry. The benefits of using these devices include reduced air pollution, compliance with regulations, energy efficiency, cost savings, and improved workplace safety. The two main types of recuperative thermal oxidizers are direct-fired and indirect-fired, each with their specific applications. Adopting the use of recuperative thermal oxidizers in semiconductor manufacturing not only helps to protect the environment but also ensures compliance with government regulations and promotes workplace safety.

会社紹介

We are a high-tech manufacturing enterprise specializing in comprehensive treatment of volatile organic compound (VOC) exhaust gas and carbon reduction and energy-saving technologies. Our core technologies include thermal energy, combustion, sealing, and automatic control. We have capabilities in temperature field simulation, air flow field simulation modeling, ceramic heat storage material performance, molecular sieve adsorption material selection, and VOC high-temperature incineration and oxidation experimental testing.

チームのメリット

We have established an RTO technology research and development center and an exhaust gas carbon reduction engineering technology center in Xi’an, as well as a 30,000 square meter production base in Yangling. We are a leading manufacturer of RTO equipment and molecular sieve wheel equipment in terms of production and sales volume globally. Our core technical team comes from the Aerospace Liquid Rocket Engine Research Institute. We currently have over 360 employees, including more than 60 R&D technology backbones, including 3 senior engineers with research-level qualifications, 6 senior engineers, and 55 thermodynamics PhDs.

コア製品

Our core products include the Rotary Valve Thermal Oxidizer (RTO) and molecular sieve adsorption concentration wheel. Combined with our expertise in environmental protection and thermal energy system engineering, we can provide customers with comprehensive solutions for industrial exhaust gas treatment, carbon reduction, and thermal energy utilization under various operating conditions.

認定、特許、栄誉

• 知的財産管理システム認証
• 品質管理システム認証
• 環境マネジメントシステム認証
• 建設業企業資格
• ハイテク企業
• Patent for Rotary Valve Thermal Oxidizer
• Patent for Rotary Heat Storage Incineration Equipment
• Patent for Disc Molecular Sieve Wheel

Choosing the Right RTO Equipment

• Determine exhaust gas characteristics
• 地域の規制と排出基準を理解する
• エネルギー効率を評価する
• 運用とメンテナンスを考慮する
• 予算とコストの分析
• 適切なRTOタイプを選択する
• 環境と安全の要素を考慮する
• パフォーマンステストと検証

Explanation:

サービスプロセス

• 相談と評価
• 設計とソリューション開発
• 生産と製造
• 設置と試運転
• アフターサポート

Explanation:

当社は、お客様向けに RTO ソリューションをカスタマイズすることに専念する専門チームを擁するワンストップ ソリューション プロバイダーです。

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