{"id":3284,"date":"2024-11-19T09:42:29","date_gmt":"2024-11-19T09:42:29","guid":{"rendered":"https:\/\/regenerative-thermal-oxidizers.com\/thermal-oxidizer-system-for-semiconductor\/"},"modified":"2024-11-19T09:42:29","modified_gmt":"2024-11-19T09:42:29","slug":"thermal-oxidizer-system-for-semiconductor","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/thermal-oxidizer-system-for-semiconductor\/","title":{"rendered":"\u534a\u5c0e\u4f53\u7528\u71b1\u9178\u5316\u88c5\u7f6e"},"content":{"rendered":"<h1>\u534a\u5c0e\u4f53\u7528\u71b1\u9178\u5316\u88c5\u7f6e<\/h1>\n<p>\u534a\u5c0e\u4f53\u696d\u754c\u3067\u306f\u3001\u5148\u9032\u7684\u306a <a href=\"https:\/\/regenerative-thermal-oxidizers.com\/ja\/rto\/\">\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0<\/a>\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u30af\u30ea\u30fc\u30f3\u3067\u7ba1\u7406\u3055\u308c\u305f\u74b0\u5883\u3092\u7dad\u6301\u3059\u308b\u4e0a\u3067\u3001\u71b1\u9178\u5316\u88c5\u7f6e\u306f\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002\u518d\u751f\u71b1\u9178\u5316\u88c5\u7f6e\uff08RTO\uff09\u3068\u3082\u547c\u3070\u308c\u308b\u71b1\u9178\u5316\u88c5\u7f6e\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u4e2d\u306b\u767a\u751f\u3059\u308b\u6709\u5bb3\u306a\u6392\u51fa\u7269\u3092\u52b9\u7387\u7684\u306b\u51e6\u7406\u30fb\u9664\u53bb\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p><img decoding=\"async\" src=\"https:\/\/regenerative-thermal-oxidizers.com\/wp-content\/uploads\/2023\/12\/0_rto-11.webp\" alt=\"\u534a\u5c0e\u4f53\u7528\u71b1\u9178\u5316\u88c5\u7f6e\" title=\"\"><\/p>\n<h2>1. \u71b1\u9178\u5316\u88c5\u7f6e\u3068\u306f\u4f55\u3067\u3059\u304b?<\/h2>\n<p>\u2013 \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u7523\u696d\u6392\u6c17\u6d41\u304b\u3089\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269 (VOC) \u3068\u6709\u5bb3\u5927\u6c17\u6c5a\u67d3\u7269\u8cea (HAP) \u3092\u9664\u53bb\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u6c5a\u67d3\u5236\u5fa1\u6280\u8853\u3067\u3059\u3002<\/p>\n<p>\u2013 \u71c3\u713c\u5ba4\u5185\u3067\u6392\u6c17\u30ac\u30b9\u3092\u9ad8\u6e29\u306b\u3055\u3089\u3059\u3053\u3068\u3067\u3001VOC \u3068 HAP \u304c\u4e8c\u9178\u5316\u70ad\u7d20\u3068\u6c34\u84b8\u6c17\u306b\u9178\u5316\u3055\u308c\u307e\u3059\u3002<\/p>\n<h2>2. \u71b1\u9178\u5316\u88c5\u7f6e\u30b7\u30b9\u30c6\u30e0\u306e\u69cb\u6210\u8981\u7d20<\/h2>\n<p>\u2013 \u71c3\u713c\u5ba4\uff1a\u3053\u3053\u3067\u5b9f\u969b\u306b\u9178\u5316\u30d7\u30ed\u30bb\u30b9\u304c\u884c\u308f\u308c\u307e\u3059\u3002\u6c5a\u67d3\u7269\u8cea\u306e\u5b8c\u5168\u71c3\u713c\u306b\u5341\u5206\u306a\u6ede\u7559\u6642\u9593\u3068\u6e29\u5ea6\u3092\u78ba\u4fdd\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u2013 \u71b1\u4ea4\u63db\u5668: \u71b1\u4ea4\u63db\u5668\u306f\u71c3\u713c\u30d7\u30ed\u30bb\u30b9\u304b\u3089\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u6355\u6349\u3057\u3066\u56de\u53ce\u3057\u3001\u305d\u306e\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u4f7f\u7528\u3057\u3066\u6d41\u5165\u3059\u308b\u6392\u6c17\u30ac\u30b9\u3092\u4e88\u71b1\u3059\u308b\u3053\u3068\u3067\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u7bc0\u7d04\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30b3\u30f3\u30c8\u30ed\u30fc\u30eb \u30d1\u30cd\u30eb: \u30b3\u30f3\u30c8\u30ed\u30fc\u30eb \u30d1\u30cd\u30eb\u306b\u306f\u3001\u71b1\u9178\u5316\u88c5\u7f6e\u30b7\u30b9\u30c6\u30e0\u306e\u52d5\u4f5c\u3092\u76e3\u8996\u304a\u3088\u3073\u8abf\u6574\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u8a08\u5668\u3068\u5236\u5fa1\u88c5\u7f6e\u304c\u53ce\u5bb9\u3055\u308c\u3066\u304a\u308a\u3001\u6700\u9069\u306a\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3068\u5b89\u5168\u6027\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002<\/p>\n<h2>3. \u71b1\u9178\u5316\u88c5\u7f6e\u306e\u52d5\u4f5c\u539f\u7406<\/h2>\n<p>\u2013 \u5438\u7740: \u6392\u6c17\u30ac\u30b9\u306f\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306b\u5165\u308a\u3001\u5438\u7740\u6750\u306e\u5c64\u3092\u901a\u904e\u3057\u3066\u3001\u30ac\u30b9\u6d41\u4e2d\u306b\u5b58\u5728\u3059\u308b\u7c92\u5b50\u72b6\u7269\u8cea\u3084\u91cd\u91d1\u5c5e\u3092\u9664\u53bb\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u4e88\u71b1\uff1a\u4e88\u71b1\u30b9\u30c6\u30c3\u30d7\u3067\u306f\u3001\u71b1\u4ea4\u63db\u5668\u304b\u3089\u56de\u53ce\u3055\u308c\u305f\u71b1\u3092\u4f7f\u7528\u3057\u3066\u5165\u3063\u3066\u304f\u308b\u30ac\u30b9\u306e\u6e29\u5ea6\u3092\u4e0a\u3052\u3066\u3001\u52b9\u7387\u7684\u306a\u71b1\u5206\u89e3\u3092\u78ba\u5b9f\u306b\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u71c3\u713c: \u4e88\u71b1\u3055\u308c\u305f\u30ac\u30b9\u306f\u71c3\u713c\u5ba4\u306b\u5165\u308a\u3001\u305d\u3053\u3067\u9ad8\u6e29 (\u901a\u5e38 1400 \uff5e 1800 \u00b0F) \u306b\u3055\u3089\u3055\u308c\u3066\u9178\u5316\u53cd\u5fdc\u304c\u958b\u59cb\u3055\u308c\u307e\u3059\u3002<\/p>\n<p>\u2013 \u71b1\u56de\u53ce: \u71c3\u713c\u5f8c\u3001\u9ad8\u6e29\u306e\u30af\u30ea\u30fc\u30f3\u306a\u30ac\u30b9\u304c\u71b1\u4ea4\u63db\u5668\u3092\u901a\u904e\u3057\u3001\u305d\u306e\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u6d41\u5165\u3059\u308b\u6392\u6c17\u30ac\u30b9\u306b\u4f1d\u9054\u3055\u308c\u3001\u30b7\u30b9\u30c6\u30e0\u5168\u4f53\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u304c\u524a\u6e1b\u3055\u308c\u307e\u3059\u3002<\/p>\n<h2>4. \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u3092\u4f7f\u7528\u3059\u308b\u5229\u70b9<\/h2>\n<p>\u2013 \u9ad8\u52b9\u7387: \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306f\u6c5a\u67d3\u7269\u8cea\u306e\u7834\u58ca\u52b9\u7387\u304c\u975e\u5e38\u306b\u9ad8\u304f\u3001\u7834\u58ca\u52b9\u7387\u306f 99% \u3092\u8d85\u3048\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30b3\u30b9\u30c8\u524a\u6e1b: \u30b7\u30b9\u30c6\u30e0\u306e\u71b1\u56de\u53ce\u6a5f\u80fd\u306b\u3088\u308a\u5927\u5e45\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc0\u7d04\u304c\u53ef\u80fd\u306b\u306a\u308a\u3001\u9577\u671f\u7684\u306b\u306f\u904b\u7528\u30b3\u30b9\u30c8\u304c\u524a\u6e1b\u3055\u308c\u307e\u3059\u3002<\/p>\n<p>\u2013 \u898f\u5236\u3078\u306e\u6e96\u62e0: \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306f\u3001VOC \u3068 HAP \u3092\u52b9\u679c\u7684\u306b\u9664\u53bb\u3059\u308b\u3053\u3068\u3067\u3001\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u304c\u53b3\u3057\u3044\u74b0\u5883\u898f\u5236\u306b\u6e96\u62e0\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p>\n<p>\u2013 \u6700\u5c0f\u9650\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9: \u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u4fe1\u983c\u6027\u304c\u9ad8\u304f\u7d99\u7d9a\u7684\u306a\u64cd\u4f5c\u3092\u5b9f\u73fe\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u304a\u308a\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u304c\u6700\u5c0f\u9650\u3067\u6e08\u307f\u3001\u4e2d\u65ad\u306e\u306a\u3044\u751f\u7523\u30d7\u30ed\u30bb\u30b9\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002<\/p>\n<h2>5. \u534a\u5c0e\u4f53\u7523\u696d\u306b\u304a\u3051\u308b\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306e\u5fdc\u7528<\/h2>\n<p>\u2013 \u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u5265\u96e2: \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u3092\u4f7f\u7528\u3057\u3066\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u304a\u3088\u3073\u5265\u96e2\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u767a\u751f\u3059\u308b\u6392\u6c17\u30ac\u30b9\u3092\u51e6\u7406\u3057\u3001\u6709\u5bb3\u306a\u5316\u5b66\u7269\u8cea\u3092\u78ba\u5b9f\u306b\u9664\u53bb\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc: \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u6392\u51fa\u3055\u308c\u308b\u6c5a\u67d3\u7269\u8cea\u3092\u6355\u6349\u3057\u3066\u7834\u58ca\u3057\u3001\u88fd\u9020\u65bd\u8a2d\u5168\u4f53\u306e\u7a7a\u6c17\u306e\u8cea\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002<\/p>\n<p>\u2013 \u62e1\u6563\u3068\u30a4\u30aa\u30f3\u6ce8\u5165: \u3053\u308c\u3089\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u63ee\u767a\u6027\u30ac\u30b9\u304c\u983b\u7e41\u306b\u751f\u6210\u3055\u308c\u307e\u3059\u304c\u3001\u5927\u6c17\u4e2d\u3078\u306e\u653e\u51fa\u3092\u9632\u3050\u305f\u3081\u306b\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306b\u3088\u3063\u3066\u52b9\u7387\u7684\u306b\u51e6\u7406\u3055\u308c\u307e\u3059\u3002<\/p>\n<p>\u2013 \u5316\u5b66\u84b8\u7740\u6cd5 (CVD): CVD \u30d7\u30ed\u30bb\u30b9\u3067\u306f\u6709\u5bb3\u306a\u30ac\u30b9\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u304c\u3001\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306b\u3088\u308a\u3053\u308c\u3089\u306e\u30ac\u30b9\u306f\u74b0\u5883\u306b\u6392\u51fa\u3055\u308c\u308b\u524d\u306b\u9664\u53bb\u3055\u308c\u307e\u3059\u3002<\/p>\n<h2>6. \u71b1\u9178\u5316\u88c5\u7f6e\u30b7\u30b9\u30c6\u30e0\u306e\u9078\u629e\u306b\u95a2\u3059\u308b\u8003\u616e\u4e8b\u9805<\/h2>\n<p>\u2013 \u5bb9\u91cf: \u30b7\u30b9\u30c6\u30e0\u306f\u3001\u7279\u5b9a\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u95a2\u9023\u3059\u308b\u6392\u6c17\u30ac\u30b9\u306e\u91cf\u3068\u7d44\u6210\u3092\u51e6\u7406\u3067\u304d\u308b\u5bb9\u91cf\u3092\u6301\u3063\u3066\u3044\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387: \u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u904b\u7528\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u305f\u3081\u306b\u3001\u9ad8\u3044\u71b1\u56de\u53ce\u6a5f\u80fd\u3092\u5099\u3048\u305f\u30b7\u30b9\u30c6\u30e0\u3092\u63a2\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u898f\u5236\u9075\u5b88: \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u304c\u9069\u7528\u3055\u308c\u308b\u3059\u3079\u3066\u306e\u74b0\u5883\u898f\u5236\u304a\u3088\u3073\u6392\u51fa\u57fa\u6e96\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u4fe1\u983c\u6027: \u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u3068\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306e\u5fc5\u8981\u6027\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u305f\u3081\u306b\u3001\u4fe1\u983c\u6027\u3068\u8010\u4e45\u6027\u306b\u512a\u308c\u305f\u6a5f\u5668\u3092\u88fd\u9020\u3059\u308b\u3053\u3068\u3067\u77e5\u3089\u308c\u308b\u8a55\u5224\u306e\u826f\u3044\u30e1\u30fc\u30ab\u30fc\u306e\u30b7\u30b9\u30c6\u30e0\u3092\u9078\u629e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n<h2>7. \u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3068\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0<\/h2>\n<p>\u2013 \u5b9a\u671f\u691c\u67fb: \u5b9a\u671f\u7684\u306b\u691c\u67fb\u3092\u5b9f\u65bd\u3057\u3066\u3001\u6469\u8017\u3001\u8150\u98df\u3001\u640d\u50b7\u306e\u5146\u5019\u304c\u306a\u3044\u304b\u78ba\u8a8d\u3057\u3001\u554f\u984c\u304c\u3042\u308c\u3070\u3059\u3050\u306b\u5bfe\u51e6\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u6e05\u6383: \u71c3\u713c\u5ba4\u3001\u71b1\u4ea4\u63db\u5668\u3001\u305d\u306e\u4ed6\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u5b9a\u671f\u7684\u306b\u6e05\u6383\u3057\u3001\u30b7\u30b9\u30c6\u30e0\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u84c4\u7a4d\u3057\u305f\u7834\u7247\u3084\u6c5a\u308c\u3092\u9664\u53bb\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u76e3\u8996: \u9ad8\u5ea6\u306a\u76e3\u8996\u304a\u3088\u3073\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0\u3092\u6d3b\u7528\u3057\u3066\u3001\u30b7\u30b9\u30c6\u30e0\u306e\u52d5\u4f5c\u3068\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u7d99\u7d9a\u7684\u306b\u76e3\u8996\u3057\u3001\u7570\u5e38\u3084\u6545\u969c\u3092\u65e9\u671f\u306b\u691c\u51fa\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30c8\u30ec\u30fc\u30cb\u30f3\u30b0: \u30aa\u30da\u30ec\u30fc\u30bf\u30fc\u3068\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u62c5\u5f53\u8005\u304c\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u3092\u52b9\u679c\u7684\u306b\u64cd\u4f5c\u304a\u3088\u3073\u4fdd\u5b88\u3067\u304d\u308b\u3088\u3046\u306b\u9069\u5207\u306a\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u3092\u53d7\u3051\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002<\/p>\n<h2>8. \u534a\u5c0e\u4f53\u7528\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306e\u5c06\u6765\u52d5\u5411<\/h2>\n<p>\u2013 \u9ad8\u5ea6\u306a\u5236\u5fa1\u306e\u7d71\u5408: \u6a5f\u68b0\u5b66\u7fd2\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u3084\u4e88\u6e2c\u5206\u6790\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u5236\u5fa1\u3092\u4f7f\u7528\u3059\u308b\u3068\u3001\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306e\u52b9\u7387\u3068\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30a8\u30cd\u30eb\u30ae\u30fc\u56de\u53ce\u306e\u6539\u5584: \u5c06\u6765\u306e\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001\u3055\u3089\u306b\u52b9\u7387\u7684\u306a\u71b1\u56de\u53ce\u30e1\u30ab\u30cb\u30ba\u30e0\u304c\u7d44\u307f\u8fbc\u307e\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u91cf\u3068\u4e8c\u9178\u5316\u70ad\u7d20\u6392\u51fa\u91cf\u304c\u3055\u3089\u306b\u524a\u6e1b\u3055\u308c\u307e\u3059\u3002<\/p>\n<p>\u2013 \u6392\u51fa\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\uff1a\u9ad8\u5ea6\u306a\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u306b\u3088\u308a\u3001\u6392\u51fa\u306b\u95a2\u3059\u308b\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u30c7\u30fc\u30bf\u304c\u63d0\u4f9b\u3055\u308c\u3001\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3092\u78ba\u4fdd\u3057\u3001\u30b7\u30b9\u30c6\u30e0\u904b\u7528\u3092\u6700\u9069\u5316\u3059\u308b\u305f\u3081\u306e\u7a4d\u6975\u7684\u306a\u5bfe\u7b56\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n<p>\u2013 \u30d5\u30c3\u30c8\u30d7\u30ea\u30f3\u30c8\u306e\u5c0f\u578b\u5316: \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u5360\u6709\u30b9\u30da\u30fc\u30b9\u304c\u5c11\u306a\u304f\u3001\u65e2\u5b58\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u65bd\u8a2d\u3078\u306e\u7d71\u5408\u304c\u5bb9\u6613\u306a\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u71b1\u9178\u5316\u88c5\u7f6e\u30b7\u30b9\u30c6\u30e0\u306e\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002<\/p>\n<p>\u7dcf\u3058\u3066\u3001\u71b1\u9178\u5316\u30b7\u30b9\u30c6\u30e0\u306f\u534a\u5c0e\u4f53\u7523\u696d\u306b\u304a\u3044\u3066\u4e0d\u53ef\u6b20\u306a\u8981\u7d20\u3067\u3042\u308a\u3001\u74b0\u5883\u4fdd\u8b77\u3068\u52b4\u50cd\u8005\u306e\u5065\u5eb7\u3068\u5b89\u5168\u3092\u78ba\u4fdd\u3057\u3066\u3044\u307e\u3059\u3002\u6709\u5bb3\u306a\u6c5a\u67d3\u7269\u8cea\u3092\u52b9\u7387\u7684\u306b\u7834\u58ca\u3057\u306a\u304c\u3089\u8cb4\u91cd\u306a\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u56de\u53ce\u3059\u308b\u80fd\u529b\u306f\u3001\u4e16\u754c\u4e2d\u306e\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u306b\u3068\u3063\u3066\u8cb4\u91cd\u306a\u8cc7\u7523\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n<div>\n<h2>\u4f1a\u793e\u7d39\u4ecb<\/h2>\n<p>\u5f53\u793e\u306f\u3001\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\uff08VOC\uff09\u6392\u30ac\u30b9\u306e\u7dcf\u5408\u51e6\u7406\u3068\u70ad\u7d20\u524a\u6e1b\u7701\u30a8\u30cd\u6280\u8853\u3092\u30cf\u30a4\u30a8\u30f3\u30c9\u6a5f\u5668\u306e\u88fd\u9020\u306b\u7279\u5316\u3059\u308b\u30cf\u30a4\u30c6\u30af\u4f01\u696d\u3067\u3059\u3002\u5f53\u793e\u306e\u4e2d\u6838\u6280\u8853\u30c1\u30fc\u30e0\u306f\u3001\u822a\u7a7a\u5b87\u5b99\u6db2\u4f53\u30ed\u30b1\u30c3\u30c8\u30a8\u30f3\u30b8\u30f3\u7814\u7a76\u6240\uff08\u822a\u7a7a\u5b87\u5b99\u516d\u7814\u7a76\u6240\uff09\u51fa\u8eab\u3067\u30013\u540d\u306e\u30b7\u30cb\u30a2\u30a8\u30f3\u30b8\u30cb\u30a2\u306816\u540d\u306e\u30b7\u30cb\u30a2\u30a8\u30f3\u30b8\u30cb\u30a2\u3092\u542b\u308060\u540d\u4ee5\u4e0a\u306e\u7814\u7a76\u958b\u767a\u6280\u8853\u8005\u3092\u64c1\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306f\u3001\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u3001\u71c3\u713c\u3001\u5bc6\u5c01\u3001\u81ea\u5df1\u5236\u5fa1\u306e4\u3064\u306e\u30b3\u30a2\u6280\u8853\u3092\u6709\u3057\u3066\u3044\u307e\u3059\u3002\u6e29\u5ea6\u5834\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3001\u6c17\u6d41\u5834\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u30e2\u30c7\u30ea\u30f3\u30b0\u3001\u30bb\u30e9\u30df\u30c3\u30af\u84c4\u71b1\u6750\u6027\u80fd\u3001\u5206\u5b50\u3075\u308b\u3044\u5438\u7740\u6750\u9078\u5b9a\u3001VOC\u9ad8\u6e29\u713c\u5374\u9178\u5316\u5b9f\u9a13\u30c6\u30b9\u30c8\u306a\u3069\u306e\u80fd\u529b\u3092\u6709\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306f\u3001\u53e4\u90fd\u897f\u5b89\u306bRTO\u6280\u8853\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u3068\u6392\u30ac\u30b9\u70ad\u7d20\u524a\u6e1b\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u6280\u8853\u30bb\u30f3\u30bf\u30fc\u3092\u8a2d\u7acb\u3057\u3001\u694a\u9675\u306b\u306f3\u4e07\u5e73\u65b9\u30e1\u30fc\u30c8\u30eb\u306e\u751f\u7523\u62e0\u70b9\u3092\u6709\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306eRTO\u6a5f\u5668\u306e\u751f\u7523\u91cf\u3068\u8ca9\u58f2\u91cf\u306f\u4e16\u754c\u3092\u30ea\u30fc\u30c9\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\n    <img decoding=\"async\" src=\"https:\/\/regenerative-thermal-oxidizers.com\/wp-content\/uploads\/2024\/11\/0-rto-manufactory-6.webp\" alt=\"\" title=\"\">\n  <\/p>\n<h2>\u7814\u7a76\u958b\u767a\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/h2>\n<ul>\n<li>\n      <strong>\u9ad8\u52b9\u7387\u71c3\u713c\u5236\u5fa1\u6280\u8853\u30c6\u30b9\u30c8\u30d9\u30f3\u30c1\uff1a<\/strong> \u3053\u306e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u3088\u308a\u3001\u9ad8\u52b9\u7387\u71c3\u713c\u5236\u5fa1\u6280\u8853\u306b\u95a2\u3059\u308b\u5b9f\u9a13\u3084\u8a66\u9a13\u3092\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u3001\u71c3\u713c\u52b9\u7387\u306e\u6700\u9069\u5316\u3068\u6392\u51fa\u91cf\u306e\u524a\u6e1b\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u5206\u5b50\u3075\u308b\u3044\u5438\u7740\u52b9\u7387\u8a66\u9a13\u30d9\u30f3\u30c1:<\/strong> \u3053\u306e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u3088\u308a\u3001\u69d8\u3005\u306a\u5206\u5b50\u3075\u308b\u3044\u5438\u7740\u6750\u306e\u6027\u80fd\u3092\u8a55\u4fa1\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001VOC\u9664\u53bb\u306b\u6700\u3082\u52b9\u679c\u7684\u306a\u6750\u6599\u3092\u6c7a\u5b9a\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u9ad8\u52b9\u7387\u30bb\u30e9\u30df\u30c3\u30af\u84c4\u71b1\u6280\u8853\u8a66\u9a13\u30d9\u30f3\u30c1\uff1a<\/strong> \u3053\u306e\u30c6\u30b9\u30c8\u30d9\u30f3\u30c1\u306b\u3088\u308a\u3001\u30bb\u30e9\u30df\u30c3\u30af\u84c4\u71b1\u6750\u306e\u6027\u80fd\u3092\u89e3\u6790\u30fb\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u6a5f\u5668\u306e\u71b1\u52b9\u7387\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u8d85\u9ad8\u6e29\u5ec3\u71b1\u56de\u53ce\u8a66\u9a13\u30d9\u30f3\u30c1\uff1a<\/strong> \u3053\u306e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u3088\u308a\u3001\u8d85\u9ad8\u6e29\u3067\u306e\u5ec3\u71b1\u56de\u53ce\u6280\u8853\u306e\u63a2\u7a76\u30fb\u958b\u767a\u304c\u53ef\u80fd\u306b\u306a\u308a\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u306e\u5411\u4e0a\u3068\u4e8c\u9178\u5316\u70ad\u7d20\u6392\u51fa\u91cf\u306e\u524a\u6e1b\u306b\u8ca2\u732e\u3057\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u6c17\u4f53\u6d41\u4f53\u30b7\u30fc\u30eb\u6280\u8853\u30c6\u30b9\u30c8\u30d9\u30f3\u30c1:<\/strong> \u3053\u306e\u30c6\u30b9\u30c8\u30d9\u30f3\u30c1\u3067\u306f\u3001\u6c17\u4f53\u6d41\u4f53\u30b7\u30fc\u30eb\u6280\u8853\u306e\u958b\u767a\u30fb\u5f37\u5316\u306e\u305f\u3081\u306e\u5b9f\u9a13\u3092\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u3001\u6a5f\u5668\u306e\u6c17\u5bc6\u6027\u3068\u4fe1\u983c\u6027\u3092\u78ba\u4fdd\u3057\u3066\u3044\u307e\u3059\u3002\n    <\/li>\n<\/ul>\n<p>\n    <img decoding=\"async\" src=\"https:\/\/regenerative-thermal-oxidizers.com\/wp-content\/uploads\/2024\/10\/0-rto-Certification.webp\" alt=\"\" title=\"\">\n  <\/p>\n<h2>\u7279\u8a31\u3068\u6804\u8a89<\/h2>\n<p>\u30b3\u30a2\u6280\u8853\u306b\u95a2\u3057\u3066\u306f\u3001\u5408\u8a0868\u4ef6\u306e\u7279\u8a31\u3092\u51fa\u9858\u3057\u3066\u304a\u308a\u3001\u305d\u306e\u3046\u3061\u767a\u660e\u7279\u8a31\u306f21\u4ef6\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u7279\u8a31\u306f\u5f53\u793e\u306e\u6280\u8853\u306e\u4e3b\u8981\u90e8\u5206\u3092\u30ab\u30d0\u30fc\u3057\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u767a\u660e\u7279\u8a314\u4ef6\u3001\u5b9f\u7528\u65b0\u6848\u7279\u8a3141\u4ef6\u3001\u610f\u5320\u7279\u8a316\u4ef6\u3001\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2\u8457\u4f5c\u6a297\u4ef6\u3092\u53d6\u5f97\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\n    <img decoding=\"async\" src=\"https:\/\/regenerative-thermal-oxidizers.com\/wp-content\/uploads\/2024\/10\/0-rto-factory.webp\" alt=\"\" title=\"\">\n  <\/p>\n<h2>\u751f\u7523\u80fd\u529b<\/h2>\n<ul>\n<li>\n      <strong>\u92fc\u677f\u304a\u3088\u3073\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u81ea\u52d5\u30b7\u30e7\u30c3\u30c8\u30d6\u30e9\u30b9\u30c8\u5857\u88c5\u751f\u7523\u30e9\u30a4\u30f3\uff1a<\/strong> \u3053\u306e\u751f\u7523\u30e9\u30a4\u30f3\u306f\u3001\u92fc\u677f\u304a\u3088\u3073\u92fc\u5f62\u6750\u306e\u30b7\u30e7\u30c3\u30c8\u30d6\u30e9\u30b9\u30c8\u3068\u5857\u88c5\u3092\u81ea\u52d5\u3067\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u3001\u8a2d\u5099\u306e\u9ad8\u54c1\u8cea\u306a\u8868\u9762\u51e6\u7406\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u624b\u52d5\u30b7\u30e7\u30c3\u30c8\u30d6\u30e9\u30b9\u30c8\u751f\u7523\u30e9\u30a4\u30f3:<\/strong> \u5f53\u793e\u306e\u624b\u52d5\u30b7\u30e7\u30c3\u30c8\u30d6\u30e9\u30b9\u30c8\u751f\u7523\u30e9\u30a4\u30f3\u3067\u306f\u3001\u624b\u4f5c\u696d\u3067\u4e0d\u7d14\u7269\u3092\u9664\u53bb\u3057\u3001\u8868\u9762\u3092\u6b21\u306e\u51e6\u7406\u306b\u5411\u3051\u3066\u6e96\u5099\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u8a2d\u5099\u306e\u6e05\u6f54\u3055\u3068\u54c1\u8cea\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u9664\u5875\u30fb\u74b0\u5883\u4fdd\u8b77\u88c5\u7f6e\uff1a<\/strong> \u5f53\u793e\u306f\u3001\u9664\u5875\u30fb\u74b0\u5883\u4fdd\u8b77\u6a5f\u5668\u306e\u88fd\u9020\u3092\u5c02\u9580\u3068\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306e\u88fd\u54c1\u306f\u5927\u6c17\u6c5a\u67d3\u3092\u52b9\u679c\u7684\u306b\u6291\u5236\u3057\u3001\u3088\u308a\u30af\u30ea\u30fc\u30f3\u306a\u74b0\u5883\u306e\u5b9f\u73fe\u306b\u8ca2\u732e\u3057\u3066\u3044\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u81ea\u52d5\u5857\u88c5\u30b9\u30d7\u30ec\u30fc\u30d6\u30fc\u30b9\uff1a<\/strong> \u5f53\u793e\u306e\u81ea\u52d5\u5857\u88c5\u30d6\u30fc\u30b9\u306f\u3001\u6a5f\u5668\u3078\u306e\u6b63\u78ba\u304b\u3064\u5747\u4e00\u306a\u5857\u88c5\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002\u5b8c\u6210\u54c1\u306e\u5916\u89b3\u3068\u8010\u4e45\u6027\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002\n    <\/li>\n<li>\n      <strong>\u4e7e\u71e5\u5ba4:<\/strong> \u4e7e\u71e5\u5ba4\u3067\u306f\u3001\u6a5f\u5668\u306e\u5857\u88c5\u9762\u3092\u52b9\u7387\u7684\u306b\u4e7e\u71e5\u30fb\u786c\u5316\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u54c1\u8cea\u3068\u8010\u4e45\u6027\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002\n    <\/li>\n<\/ul>\n<p>\n    <img decoding=\"async\" src=\"https:\/\/regenerative-thermal-oxidizers.com\/wp-content\/uploads\/2023\/12\/0_rto-17.webp\" alt=\"\" title=\"\">\n  <\/p>\n<h2>\u79c1\u305f\u3061\u3068\u5354\u529b\u3059\u308b<\/h2>\n<p>VOC\uff08\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\uff09\u306e\u6392\u30ac\u30b9\u51e6\u7406\u3068\u70ad\u7d20\u524a\u6e1b\u306b\u304a\u3051\u308b\u5f53\u793e\u306e\u5c02\u9580\u77e5\u8b58\u3092\u6d3b\u304b\u3057\u3001\u305c\u3072\u5f53\u793e\u3068\u9023\u643a\u3057\u3066\u3054\u6d3b\u7528\u304f\u3060\u3055\u3044\u3002\u5f53\u793e\u3092\u304a\u9078\u3073\u3044\u305f\u3060\u304f6\u3064\u306e\u30e1\u30ea\u30c3\u30c8\u3092\u3054\u7d39\u4ecb\u3057\u307e\u3059\u3002<\/p>\n<ul>\n<li>VOC\u6392\u6c17\u30ac\u30b9\u51e6\u7406\u306b\u304a\u3051\u308b\u9ad8\u5ea6\u306a\u6280\u8853\u3068\u5c02\u9580\u77e5\u8b58<\/li>\n<li>\u5f37\u529b\u306a\u7814\u7a76\u958b\u767a\u80fd\u529b<\/li>\n<li>\u696d\u754c\u3092\u30ea\u30fc\u30c9\u3059\u308b\u751f\u7523\u8a2d\u5099\u3068\u751f\u7523\u80fd\u529b<\/li>\n<li>\u74b0\u5883\u4fdd\u8b77\u3068\u7701\u30a8\u30cd\u306b\u95a2\u3059\u308b\u8c4a\u5bcc\u306a\u7d4c\u9a13<\/li>\n<li>\u7279\u8a31\u3068\u6804\u8a89\u306e\u5b9f\u7e3e<\/li>\n<li>\u9867\u5ba2\u6e80\u8db3\u3068\u9577\u671f\u7684\u306a\u30d1\u30fc\u30c8\u30ca\u30fc\u30b7\u30c3\u30d7\u3078\u306e\u30b3\u30df\u30c3\u30c8\u30e1\u30f3\u30c8<\/li>\n<\/ul>\n<p>\n    <img decoding=\"async\" src=\"https:\/\/regenerative-thermal-oxidizers.com\/wp-content\/uploads\/2023\/12\/0_rto-17.webp\" alt=\"\" title=\"\">\n  <\/p>\n<p>\u8457\u8005\u5bae<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>thermal oxidizer system for semiconductor In the semiconductor industry, the use of advanced thermal oxidizer systems plays a crucial role in maintaining a clean and controlled environment for manufacturing processes. A thermal oxidizer system, also known as a regenerative thermal oxidizer (RTO), is designed to efficiently treat and eliminate harmful emissions generated during semiconductor production. 1. What is a thermal oxidizer system? – A thermal oxidizer system is a pollution control technology used to remove volatile organic compounds (VOCs) and hazardous air pollutants (HAPs) from industrial exhaust streams. – It works by subjecting the exhaust gases to high temperatures in a combustion chamber, where the VOCs and HAPs are oxidized [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[34],"tags":[18,19,35],"class_list":["post-3284","post","type-post","status-publish","format-standard","hentry","category-thermal-oxidizer-system-blog","tag-regenerative-thermal-oxidizer","tag-rto","tag-thermal-oxidizer-system"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/posts\/3284","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/comments?post=3284"}],"version-history":[{"count":0,"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/posts\/3284\/revisions"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/media?parent=3284"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/categories?post=3284"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/ja\/wp-json\/wp\/v2\/tags?post=3284"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}