{"id":1971,"date":"2024-10-17T08:51:49","date_gmt":"2024-10-17T08:51:49","guid":{"rendered":"https:\/\/regenerative-thermal-oxidizers.com\/regenerative-thermal-oxidizer-in-semiconductor-industry\/"},"modified":"2024-10-17T08:51:49","modified_gmt":"2024-10-17T08:51:49","slug":"regenerative-thermal-oxidizer-in-semiconductor-industry","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/regenerative-thermal-oxidizer-in-semiconductor-industry\/","title":{"rendered":"Regenerativn\u00ed termick\u00fd oxid\u00e1tor v polovodi\u010dov\u00e9m pr\u016fmyslu"},"content":{"rendered":"

Regenerativn\u00ed termick\u00fd oxid\u00e1tor v polovodi\u010dov\u00e9m pr\u016fmyslu<\/h1>\n

Zaveden\u00ed<\/h2>\n

V\u00fdroba polovodi\u010d\u016f je energeticky n\u00e1ro\u010dn\u00e9 odv\u011btv\u00ed, kter\u00e9 se pro udr\u017een\u00ed kvality a efektivity spol\u00e9h\u00e1 na specializovan\u00e9 vybaven\u00ed. Regenera\u010dn\u00ed tepeln\u00fd oxid\u00e1tor<\/a>, neboli RTO, je kl\u00ed\u010dovou sou\u010d\u00e1st\u00ed mnoha z\u00e1vod\u016f na v\u00fdrobu polovodi\u010d\u016f. V tomto \u010dl\u00e1nku se budeme zab\u00fdvat v\u00fdznamem RTO v polovodi\u010dov\u00e9m pr\u016fmyslu, jejich z\u00e1kladn\u00edm fungov\u00e1n\u00edm a t\u00edm, jak pom\u00e1haj\u00ed zajistit udr\u017eitelnost a efektivitu v\u00fdroby polovodi\u010d\u016f.<\/p>\n

Co je to RTO?<\/h2>\n

RTO je typ pr\u016fmyslov\u00e9ho syst\u00e9mu pro regulaci zne\u010di\u0161t\u011bn\u00ed ovzdu\u0161\u00ed, kter\u00fd se pou\u017e\u00edv\u00e1 k \u010di\u0161t\u011bn\u00ed odpadn\u00edho vzduchu z pr\u016fmyslov\u00fdch proces\u016f. V p\u0159\u00edpad\u011b polovodi\u010dov\u00e9ho pr\u016fmyslu jsou RTO navr\u017eeny k \u010di\u0161t\u011bn\u00ed vzduchu, kter\u00fd je ods\u00e1v\u00e1n z r\u016fzn\u00fdch procesn\u00edch n\u00e1stroj\u016f pou\u017e\u00edvan\u00fdch p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f. RTO funguje na principu kombinace tepla a chemick\u00fdch reakc\u00ed, kter\u00e9 p\u0159em\u011b\u0148uj\u00ed \u0161kodliv\u00e9 zne\u010di\u0161\u0165uj\u00edc\u00ed l\u00e1tky ve odpadn\u00edm vzduchu na ne\u0161kodn\u00e9 slou\u010deniny p\u0159ed jejich uvoln\u011bn\u00edm do atmosf\u00e9ry.<\/p>\n

Jak funguje RTO?<\/h3>\n

RTO funguje na principu procesu zvan\u00e9ho termick\u00e1 oxidace, kter\u00fd rozkl\u00e1d\u00e1 a eliminuje \u0161kodliv\u00e9 zne\u010di\u0161\u0165uj\u00edc\u00ed l\u00e1tky z odv\u00e1d\u011bn\u00e9ho vzduchu. RTO se skl\u00e1d\u00e1 ze t\u0159\u00ed hlavn\u00edch sou\u010d\u00e1st\u00ed: spalovac\u00ed komory, v\u00fdm\u011bn\u00edku tepla a \u0159\u00eddic\u00edho syst\u00e9mu. Spalovac\u00ed komora je m\u00edstem, kam je p\u0159iv\u00e1d\u011bn odv\u00e1d\u011bn\u00fd vzduch nasycen\u00fd zne\u010di\u0161\u0165uj\u00edc\u00edmi l\u00e1tkami a oh\u0159\u00edv\u00e1n na vysokou teplotu. V\u00fdm\u011bn\u00edk tepla je m\u00edstem, kde se hork\u00fd odv\u00e1d\u011bn\u00fd vzduch ochlad\u00ed a teplo se zachyt\u00ed a znovu vyu\u017eije. \u0158\u00eddic\u00ed syst\u00e9m je zodpov\u011bdn\u00fd za monitorov\u00e1n\u00ed a regulaci teploty, pr\u016ftoku a dal\u0161\u00edch parametr\u016f, aby se zajistila efektivn\u00ed \u010dinnost RTO.<\/p>\n

V\u00fdhody RTO v polovodi\u010dov\u00e9m pr\u016fmyslu<\/h2>\n

RTO nab\u00edzej\u00ed polovodi\u010dov\u00e9mu pr\u016fmyslu n\u011bkolik v\u00fdhod, v\u010detn\u011b:<\/p>\n

1. Dodr\u017eov\u00e1n\u00ed p\u0159edpis\u016f na ochranu \u017eivotn\u00edho prost\u0159ed\u00ed<\/h3>\n

Pr\u016fmysl polovodi\u010d\u016f podl\u00e9h\u00e1 p\u0159\u00edsn\u00fdm environment\u00e1ln\u00edm p\u0159edpis\u016fm a za\u0159\u00edzen\u00ed RTO (React Tools - tepeln\u00e9 reaktory) pom\u00e1haj\u00ed zajistit jejich dodr\u017eov\u00e1n\u00ed. \u010ci\u0161t\u011bn\u00edm odpadn\u00edho vzduchu z r\u016fzn\u00fdch procesn\u00edch n\u00e1stroj\u016f pom\u00e1haj\u00ed za\u0159\u00edzen\u00ed RTO sni\u017eovat emise \u0161kodliv\u00fdch zne\u010di\u0161\u0165uj\u00edc\u00edch l\u00e1tek, jako jsou t\u011bkav\u00e9 organick\u00e9 slou\u010deniny (VOC) a oxidy dus\u00edku (NOx).<\/p>\n

2. Energetick\u00e1 \u00fa\u010dinnost<\/h3>\n

Termoelektrick\u00e9 topn\u00e9 syst\u00e9my (RTO) jsou energeticky \u00fasporn\u00e9, proto\u017ee dok\u00e1\u017e\u00ed rekuperovat a znovu vyu\u017e\u00edt velkou \u010d\u00e1st tepla generovan\u00e9ho b\u011bhem procesu spalov\u00e1n\u00ed. To znamen\u00e1, \u017ee k udr\u017een\u00ed vysok\u00fdch teplot pot\u0159ebn\u00fdch pro proces termick\u00e9 oxidace je zapot\u0159eb\u00ed m\u00e9n\u011b energie, co\u017e vede k ni\u017e\u0161\u00edm n\u00e1klad\u016fm na energii a v\u011bt\u0161\u00ed udr\u017eitelnosti.<\/p>\n

3. \u00daspora n\u00e1klad\u016f<\/h3>\n

Sn\u00ed\u017een\u00edm emis\u00ed \u0161kodliv\u00fdch zne\u010di\u0161\u0165uj\u00edc\u00edch l\u00e1tek mohou RTO tak\u00e9 pomoci sn\u00ed\u017eit n\u00e1klady spojen\u00e9 s dodr\u017eov\u00e1n\u00edm p\u0159edpis\u016f v oblasti \u017eivotn\u00edho prost\u0159ed\u00ed. Krom\u011b toho mohou \u00faspory energie spojen\u00e9 s RTO v\u00e9st k v\u00fdznamn\u00fdm \u00faspor\u00e1m n\u00e1klad\u016f v pr\u016fb\u011bhu \u010dasu.<\/p>\n

RTO v akci: P\u0159\u00edpadov\u00e1 studie<\/h2>\n

Pro ilustraci efektivity RTO v polovodi\u010dov\u00e9m pr\u016fmyslu si uk\u00e1\u017eeme p\u0159\u00edpadovou studii. Z\u00e1vod na v\u00fdrobu polovodi\u010d\u016f v Kalifornii \u010delil rostouc\u00edmu tlaku na sni\u017eov\u00e1n\u00ed emis\u00ed t\u011bkav\u00fdch organick\u00fdch zl\u00fa\u010den\u00edn (VOC) a dal\u0161\u00edch \u0161kodliv\u00fdch zne\u010di\u0161\u0165uj\u00edc\u00edch l\u00e1tek. Z\u00e1vod nainstaloval RTO pro \u010di\u0161t\u011bn\u00ed odpadn\u00edho vzduchu z procesn\u00edch n\u00e1stroj\u016f a v\u00fdsledky byly p\u016fsobiv\u00e9. RTO dok\u00e1zalo sn\u00ed\u017eit emise VOC o v\u00edce ne\u017e 901 TP4T, co\u017e vedlo k v\u00fdznamn\u00fdm \u00faspor\u00e1m n\u00e1klad\u016f a \u010dist\u0161\u00edmu \u017eivotn\u00edmu prost\u0159ed\u00ed.<\/p>\n

Z\u00e1v\u011br<\/h2>\n

Z\u00e1v\u011brem lze \u0159\u00edci, \u017ee RTO hraj\u00ed kl\u00ed\u010dovou roli v polovodi\u010dov\u00e9m pr\u016fmyslu t\u00edm, \u017ee pom\u00e1haj\u00ed zajistit dodr\u017eov\u00e1n\u00ed environment\u00e1ln\u00edch p\u0159edpis\u016f, podporuj\u00ed energetickou \u00fa\u010dinnost a sni\u017euj\u00ed n\u00e1klady. D\u00edky kombinaci tepla a chemick\u00fdch reakc\u00ed jsou RTO schopny \u010distit odpadn\u00ed vzduch z pr\u016fmyslov\u00fdch proces\u016f a p\u0159em\u011b\u0148ovat \u0161kodliv\u00e9 zne\u010di\u0161\u0165uj\u00edc\u00ed l\u00e1tky na ne\u0161kodn\u00e9 slou\u010deniny. S r\u016fstem a v\u00fdvojem v\u00fdroby polovodi\u010d\u016f z\u016fstanou RTO nezbytnou sou\u010d\u00e1st\u00ed udr\u017eiteln\u00e9ho a efektivn\u00edho pr\u016fmyslu.<\/p>\n

P\u0159edstaven\u00ed spole\u010dnosti<\/h2>\n

Jsme podnik vyr\u00e1b\u011bj\u00edc\u00ed \u0161pi\u010dkov\u00e1 za\u0159\u00edzen\u00ed, kter\u00fd se zam\u011b\u0159uje na komplexn\u00ed zpracov\u00e1n\u00ed v\u00fdfukov\u00fdch plyn\u016f z t\u011bkav\u00fdch organick\u00fdch slou\u010denin (VOC) a energeticky \u00fasporn\u00e9 technologie pro sni\u017eov\u00e1n\u00ed emis\u00ed uhl\u00edku v polovodi\u010dov\u00e9m pr\u016fmyslu.<\/p>\n

Kl\u00ed\u010dov\u00e9 technologie<\/h2>\n
    \n
  • \u010cty\u0159i z\u00e1kladn\u00ed technologie tepeln\u00e9, spalovac\u00ed, t\u011bsnic\u00ed a samoregula\u010dn\u00ed<\/li>\n
  • Mo\u017enosti simulace teplotn\u00edho pole a simulace proud\u011bn\u00ed vzduchu<\/li>\n
  • Schopnost prov\u00e1d\u011bt experiment\u00e1ln\u00ed testov\u00e1n\u00ed v\u00fdkonnosti keramick\u00fdch materi\u00e1l\u016f pro akumulaci tepla, v\u00fdb\u011bru materi\u00e1l\u016f pro adsorpci molekul\u00e1rn\u00edch s\u00edt a oxida\u010dn\u00edch charakteristik VOC p\u0159i vysokoteplotn\u00edm spalov\u00e1n\u00ed<\/li>\n<\/ul>\n

    V\u00fdhody t\u00fdmu<\/h2>\n

    V Si-anu m\u00e1me v\u00fdzkumn\u00e9 a v\u00fdvojov\u00e9 centrum pro technologie RTO a technologick\u00e9 centrum pro sni\u017eov\u00e1n\u00ed emis\u00ed uhl\u00edku z odpadn\u00edch plyn\u016f a v Yanglingu m\u00e1me v\u00fdrobn\u00ed z\u00e1kladnu o rozloze 30 000 metr\u016f \u010dtvere\u010dn\u00edch. Jsme p\u0159edn\u00edm v\u00fdrobcem za\u0159\u00edzen\u00ed RTO a rota\u010dn\u00edch za\u0159\u00edzen\u00ed s molekul\u00e1rn\u00edmi s\u00edty, co se t\u00fd\u010de v\u00fdroby a prodeje. N\u00e1\u0161 hlavn\u00ed technick\u00fd t\u00fdm poch\u00e1z\u00ed z V\u00fdzkumn\u00e9ho \u00fastavu pro leteck\u00fd a kosmick\u00fd v\u00fdzkum a kapaln\u00e9 raketov\u00e9 motory (Aerospace Sixth Academy). V sou\u010dasn\u00e9 dob\u011b m\u00e1me v\u00edce ne\u017e 360 zam\u011bstnanc\u016f, v\u010detn\u011b v\u00edce ne\u017e 60 technick\u00fdch \u010dlen\u016f v\u00fdzkumn\u00e9 a v\u00fdvojov\u00e9 z\u00e1kladny, v\u010detn\u011b 3 vedouc\u00edch in\u017een\u00fdr\u016f a 6 vedouc\u00edch in\u017een\u00fdr\u016f, a 34 doktor\u016f termodynamiky.<\/p>\n

    Z\u00e1kladn\u00ed produkty<\/h2>\n

    Na\u0161imi hlavn\u00edmi produkty jsou regenerativn\u00ed termick\u00fd oxid\u00e1tor (RTO) s rota\u010dn\u00edm ventilem a adsorp\u010dn\u00ed koncentr\u00e1tor s molekul\u00e1rn\u00edm s\u00edtem. D\u00edky na\u0161im odborn\u00fdm znalostem v oblasti ochrany \u017eivotn\u00edho prost\u0159ed\u00ed a in\u017een\u00fdrstv\u00ed tepeln\u00fdch energetick\u00fdch syst\u00e9m\u016f m\u016f\u017eeme z\u00e1kazn\u00edk\u016fm poskytovat komplexn\u00ed \u0159e\u0161en\u00ed pro pr\u016fmyslov\u00e9 \u010di\u0161t\u011bn\u00ed odpadn\u00edch plyn\u016f, vyu\u017eit\u00ed energie a sni\u017eov\u00e1n\u00ed emis\u00ed uhl\u00edku v r\u016fzn\u00fdch provozn\u00edch podm\u00ednk\u00e1ch.<\/p>\n

    Certifikace, patenty a vyznamen\u00e1n\u00ed spole\u010dnosti<\/h2>\n
      \n
    • Certifikace syst\u00e9mu spr\u00e1vy du\u0161evn\u00edho vlastnictv\u00ed<\/li>\n
    • Certifikace syst\u00e9mu managementu jakosti<\/li>\n
    • Certifikace syst\u00e9mu environment\u00e1ln\u00edho managementu<\/li>\n
    • Kvalifikace pro podniky ve stavebnictv\u00ed<\/li>\n
    • High-tech Enterprise<\/li>\n
    • Patent na regenerativn\u00ed term\u00e1ln\u00ed oxid\u00e1tor s rota\u010dn\u00edm ventilem<\/li>\n
    • Patent na rota\u010dn\u00ed spalovac\u00ed za\u0159\u00edzen\u00ed pro akumulaci tepla<\/li>\n
    • Patent na rota\u010dn\u00ed za\u0159\u00edzen\u00ed s diskov\u00fdm molekul\u00e1rn\u00edm s\u00edtem<\/li>\n<\/ul>\n

      \"Image<\/p>\n

      V\u00fdb\u011br spr\u00e1vn\u00e9ho za\u0159\u00edzen\u00ed RTO<\/h2>\n
        \n
      • Zva\u017ete specifick\u00e9 po\u017eadavky polovodi\u010dov\u00e9ho pr\u016fmyslu<\/li>\n

        Vysv\u011btlen\u00ed: Za\u0159\u00edzen\u00ed RTO by m\u011blo b\u00fdt navr\u017eeno tak, aby spl\u0148ovalo specifick\u00e9 pot\u0159eby a v\u00fdzvy polovodi\u010dov\u00e9ho pr\u016fmyslu, jako je nap\u0159\u00edklad zpracov\u00e1n\u00ed t\u011bkav\u00fdch organick\u00fdch slou\u010denin (VOC) emitovan\u00fdch b\u011bhem v\u00fdrobn\u00edch proces\u016f.<\/p>\n

      • Vyhodno\u0165te kapacitu a efektivitu<\/li>\n

        Vysv\u011btlen\u00ed: Za\u0159\u00edzen\u00ed RTO by m\u011blo m\u00edt pot\u0159ebnou kapacitu a vysokou \u00fa\u010dinnost pro efektivn\u00ed zpracov\u00e1n\u00ed objemu a koncentrace t\u011bkav\u00fdch organick\u00fdch slou\u010denin (VOC) v polovodi\u010dov\u00e9m pr\u016fmyslu.<\/p>\n

      • Posouzen\u00ed provozn\u00edch a \u00fadr\u017eb\u00e1\u0159sk\u00fdch n\u00e1klad\u016f<\/li>\n

        Vysv\u011btlen\u00ed: Je d\u016fle\u017eit\u00e9 zv\u00e1\u017eit dlouhodob\u00e9 provozn\u00ed n\u00e1klady a po\u017eadavky na \u00fadr\u017ebu za\u0159\u00edzen\u00ed RTO, aby byla zaji\u0161t\u011bna n\u00e1kladov\u00e1 efektivita pro polovodi\u010dov\u00fd pr\u016fmysl.<\/p>\n

      • Zajistit dodr\u017eov\u00e1n\u00ed p\u0159edpis\u016f na ochranu \u017eivotn\u00edho prost\u0159ed\u00ed<\/li>\n

        Vysv\u011btlen\u00ed: Zvolen\u00e9 za\u0159\u00edzen\u00ed RTO by m\u011blo spl\u0148ovat p\u0159\u00edslu\u0161n\u00e9 environment\u00e1ln\u00ed p\u0159edpisy a normy, aby byl zaji\u0161t\u011bn leg\u00e1ln\u00ed a udr\u017eiteln\u00fd provoz v polovodi\u010dov\u00e9m pr\u016fmyslu.<\/p>\n<\/ul>\n

        \"Obr\u00e1zek<\/p>\n

        Servisn\u00ed proces<\/h2>\n
          \n
        1. Konzultace a hodnocen\u00ed:<\/li>\n
            \n
          • P\u0159edb\u011b\u017en\u00e1 konzultace<\/li>\n
          • Inspekce na m\u00edst\u011b<\/li>\n
          • Anal\u00fdza pot\u0159eb<\/li>\n<\/ul>\n
          • N\u00e1vrh a v\u00fdvoj \u0159e\u0161en\u00ed:<\/li>\n
              \n
            • N\u00e1vrh \u0159e\u0161en\u00ed<\/li>\n
            • Simulace a modelov\u00e1n\u00ed<\/li>\n
            • Recenze \u0159e\u0161en\u00ed<\/li>\n<\/ul>\n
            • V\u00fdroba a v\u00fdroba:<\/li>\n
                \n
              • Zak\u00e1zkov\u00e1 v\u00fdroba<\/li>\n
              • Kontrola kvality<\/li>\n
              • Tov\u00e1rn\u00ed testov\u00e1n\u00ed<\/li>\n<\/ul>\n
              • Instalace a uveden\u00ed do provozu:<\/li>\n
                  \n
                • Instalace na m\u00edst\u011b<\/li>\n
                • Uveden\u00ed do provozu a provoz<\/li>\n
                • \u0160kolic\u00ed slu\u017eby<\/li>\n<\/ul>\n
                • Poprodejn\u00ed podpora:<\/li>\n
                    \n
                  • Pravideln\u00e1 \u00fadr\u017eba<\/li>\n
                  • Technick\u00e1 podpora<\/li>\n
                  • Dod\u00e1vka n\u00e1hradn\u00edch d\u00edl\u016f<\/li>\n<\/ul>\n<\/ol>\n

                    Nab\u00edz\u00edme komplexn\u00ed \u0159e\u0161en\u00ed a m\u00e1me profesion\u00e1ln\u00ed t\u00fdm, kter\u00fd dok\u00e1\u017ee p\u0159izp\u016fsobit \u0159e\u0161en\u00ed RTO na\u0161im z\u00e1kazn\u00edk\u016fm a zajistit tak \u00fasp\u011bch ka\u017ed\u00e9ho kroku.<\/p>\n

                    Autor: Miya<\/p>\n

                    <\/html><\/p>","protected":false},"excerpt":{"rendered":"

                    Regenerative Thermal Oxidizer in semiconductor industry Introduction Semiconductor manufacturing is an energy-intensive industry which relies on specialized equipment to maintain quality and efficiency. The Regenerative Thermal Oxidizer, or RTO, is a key component of many semiconductor manufacturing plants. In this article, we will explore the importance of RTOs in the semiconductor industry, their basic functioning, […]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[17],"tags":[18,19,20],"class_list":["post-1971","post","type-post","status-publish","format-standard","hentry","category-regenerative-thermal-oxidizer-blog","tag-regenerative-thermal-oxidizer","tag-rto","tag-rto-thermal-oxidizer"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/posts\/1971","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/comments?post=1971"}],"version-history":[{"count":0,"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/posts\/1971\/revisions"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/media?parent=1971"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/categories?post=1971"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidizers.com\/cs\/wp-json\/wp\/v2\/tags?post=1971"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}